From: Model and Design of a Power Driver for Piezoelectric Stack Actuators
Measured | Estimated | Â | |||
---|---|---|---|---|---|
Charge storage [C] | Piezo Voltage [V] | Tip displacement [um] | Piezo Voltage [V] | Estimated position [μ m] | Position Error Err [%] |
275 | 45 | 16 | 45 | 16.56 | 3.38 |
384 | 65 | 24 | 65 | 23.88 | 0.48 |
545 | 83 | 34 | 83 | 34.7 | 2.03 |
604 | 90 | 40 | 90 | 38.67 | 3.44 |
714 | 110 | 48 | 110 | 46.06 | 4.21 |
878 | 120 | 56 | 120 | 57.08 | 1.89 |
933 | 130 | 60 | 130 | 60.78 | 1.28 |
1098 | 145 | 68 | 145 | 71.87 | 5.38 |
1164 | 155 | 80 | 155 | 76.3 | 4.85 |